TESCAN SOLARIS MICROELECTRÓNICA

An alternative solution for semi-automated

high-quality TEM lamella preparation

AutoLoader consists of two parts, sample magazine and loading mechanism.

- Low-kV ultra-high-resolution imaging of high-end semiconductor devices

- Precise end-pointing at low electron beam energies

- Gentle FIB thinning for improved quality results in TEM sample preparation enabled by excellent       low-kV ion beam performance

- Optimized workflows and recipes for easy preparation of ultra-thin TEM lamellae

- Semi-automated software module for site-specific TEM lamella preparation

- Preparation of advanced geometry TEM lamellae from the most advanced semiconductor nodes

- Specialized, load-lock-compatible stage carousel for TEM sample preparation

- Dedicated TEM grid holders with fully optimized geometry for advanced TEM sample preparation