VacCoat DSCR

Dual system (Metalizer Carbon Evaporator) VacCoat DSCR. Compact dual system for coating with noble metals such as gold (Au), palladium (Pd), platinum (Pt) and gold/palladium (Au/Pd) on non-conductive or poorly conductive samples, and for coating the samples with a film of carbon.

It is a versatile machine for SEM sample preparation. The full automatic option allows easy use of the system even for novice traders. User-friendly software with graphical sections simplifies perception of deposition information. Equipped with an interchangeable head with the capacity to load two carbon fibers with a diameter of 0.8 mm, to achieve a thicker carbon film if required.

Intuitive touch screen to control the coating process and fast data entry. Easy loading and unloading of samples. Repeatable film thickness depositions. High resolution thin coating (2nm gold grain order), precisely reproducible. Low voltage sputtering. No refrigeration system is required. Carbon coating in flash and pulse mode. Includes sample holder with planetary rotation. 2 inch magnetron cathode. Thermocouple vacuum gauge. Quartz crystal thickness monitor accurate to 1nm.

Electric control shutter. Automatic vent valve. Saving the last 300 coatings made With a two-stage rotary pump and direct drive of 4 m3/h. Final vacuum: Less than 50 mtorr. Pyrex cylinder chamber 170mm OD x 140mm. Transfers the curves and the data of the spraying process via USB port to the PC.

Dimensions: 45 x 50 x 37 cm. Weight 42 kg.

VacCoat PLD-T

Dual High Vacuum System (Laser Pulsed Deposition Thermal Evaporator) VacCoat PLD-T. System of of high vacuum thin film deposition of different materials by means of pulsed laser and thermal evaporation.

You can deposit complex materials and crystal structures on substrates with very little preparation. The pulsed laser deposition technique leads to efficient non-thermal ablation and preserves the stoichiometry of the target materials. By applying this method, you could deposit materials such as nitrides, oxides, superlattices, polymers, and compounds. Motorized target manipulator with adjustable rotation speed (includes 3 targets with a diameter of 2 cm).

With 3 independent thermal sources and special cable glands, whose design prevents the transfer of contamination from the source materials to other materials. Quartz crystal monitoring system for thickness measurement in real time (1 nm precision). Intuitive touch screen to control the coating process and fast data entry. Easy to use software. Transfers curves and data from the deposition process via a USB port to the PC.

Rotating sample holder.

Electronic shutter.

With high vacuum turbomolecular pump, diaphragm backup pump and full range vacuum gauge.

Dimensions: 50 × 60 × 47 cm. Weight 70 kg. (1 unit)

VacCoat DSCT

Dual high vacuum system (Metallizer Carbon Evaporator) VacCoat DSCT. Turbo pumped high vacuum system sputter coater and carbon fiber coater with interchangeable heads in one instrument suitable for SEM sample preparation.

You can deposit complex materials and crystal structures on substrates with very little preparation. The pulsed laser deposition technique leads to efficient non-thermal ablation and preserves the stoichiometry of the target materials. By applying this method, you could deposit materials such as nitrides, oxides, superlattices, polymers, and compounds. Motorized target manipulator with adjustable rotation speed (includes 3 targets with a diameter of 2 cm).

With 3 independent thermal sources and special cable glands, whose design prevents the transfer of contamination from the source materials to other materials. Quartz crystal monitoring system for thickness measurement in real time (1 nm precision). Intuitive touch screen to control the coating process and fast data entry. Easy to use software. Transfers curves and data from the deposition process via a USB port to the PC.

Rotating sample holder.

Electronic shutter.

With high vacuum turbomolecular pump, diaphragm backup pump and full range vacuum gauge.

Dimensions: 50 × 60 × 47 cm. Weight 70 kg. (1 unit)

VacCoat DST3-T

Dual high vacuum and triple target system (Metallizer Thermal Evaporator) VacCoat DST3-T. Compact system combining thermal evaporator and sputter coating, suitable for deposition of a wide range of materials for SEM and FE-SEM. It can spray semiconductors, dielectrics and metal targets (oxidizing and noble).

Equipped with three 2” diameter water-cooled cathodes suitable for prolonged deposition (unlimited without breaking vacuum). All 3 cathodes can be chosen to be angled with a common focal point (model DST3-TA), which can spray from two or three (optional) objectives simultaneously or independently to form alloys or multi-layer deposits, respectively (maximum size of substrates in this model it can be 3 inches). Or choose that all 3 cathodes are straight (model DST3-TS), suitable for pulverizing a single large sample with a diameter of up to 20 cm or several small samples. Different types of evaporative heat sources (ship, basket, and coil) can be installed on the individual heat source bracket.

Adjustable automatic tuning box, which minimizes the reflected power in the RF sputtering process. Manual or automatic deposition in time and thickness. Independent spray rate control for each cathode to produce fine grained structures. Automatic control of deposition power independent of pressure.

Automatic control of cathode temperatures to protect the life of the magnets. Two fixed and mobile quartz crystal monitoring systems for real-time thickness measurement (1 nm precision). Two precision Mass Flow Controllers (MFCs). Three manual shutters. Tilt and height adjustable rotary sample holder with cathode selection capability. Intuitive touch screen to control the coating process and fast data entry. Easy to use software.

Transfers curves and data from the deposition process via a USB port to the PC. The cylindrical vacuum chamber is made of Pyrex with an external diameter of 300 mm and a height of 200 mm. Fitted with an internally mounted 90 l/s turbomolecular pump, backed by a 1.4 m3/h diaphragm or a 4 m3/h two stage rotary pump. 500 °C substrate heater (optional). 300 V DC substrate bias voltages (optional), to increase film adhesion to the substrate and improve film structures.

Dimensions: 60 × 65 × 47 cm. Weight 160 kg. (1 unit)

VacCoat DCT

VacCoat DCT high vacuum carbon evaporator. Turbo pumped carbon coater that is ideal for FE-SEM, EDS/WDS, TEM, EBSD and thin film applications.

This high-vacuum carbon coater delivers high-quality, uniform carbon films with fine grain sizes that are suitable for samples that require high-quality, high-resolution characterization. Quartz crystal thickness monitor with 1 nm accuracy and 1 Å resolution. Pulsed or flash carbon fiber coating modes.

Vacuum chamber 170 mm outer diameter x 140 mm. Includes sample holder with planetary rotation. Electronic shutter. Automatically controlled coating independent of pressure. Precision metering valve for precise control of vacuum pressure.

Real-time graphs of coating parameters. Intuitive touch screen to control and monitor the coating process with fast data entry capability. With 90 L/S (Leybold) high vacuum turbomolecular pump without oil contamination and two-stage rotary vacuum pump as backup pump. Ultimate vacuum: less than 7 x10-7 Torr.

Full range vacuum gauge (Leybold). Transfers the curves and the data of the spraying process via USB port to the PC.

Dimensions: 45 x 50 x 37 cm. Weight 46 kg. (1 unit)

VacCoat DCR

VacCoat DCR carbon evaporator. Compact carbon fiber coating system suitable for sample preparation SEM, TEM and X-ray (EDX) analysis.

Quartz crystal monitoring system for thickness measurement in real time (1 nm precision). Pulsed or flash carbon fiber coating modes.

Includes swivel sample holder with adjustable tilt and height. Sample holder with planetary rotation (optional). Intuitive touch screen to control and monitor the coating process with fast data entry capability.

Swivel sample holder with adjustable tilt and height. Manual or fully automatic control. Electronic shutter.

Precision electronic leak valve for precise control of vacuum pressure. With two-stage rotary pump and direct drive of 4 m3/h. Final vacuum: Less than 50 mtorr. Pyrex cylinder chamber 170mm OD x 140mm. Transfers the curves and the data of the spraying process via USB port to the PC.

Dimensions: 45 x 50 x 37 cm. Weight 46 kg. (1 unit)

VacCoat DTT

VacCoat DTT thermal evaporator. Turbomolecular pumping tabletop thermal evaporator for vacuum deposition of thin films. With triple source and evaporation source selection system (ship/basket/serpentine), it is ideal for deposition of multilayers or alloys.

Capable of reaching the desired pressure in a short time, the coating process can be carried out in a few minutes. Suitable for research, laboratory and electron microscopy applications. The length of the fountain holders can be adjusted in the range of 5 cm to 9 cm.

Its good design prevents the contamination of the source materials with each other. Cylindrical vacuum chamber is made of Pyrex with an external diameter of 300 mm and a height of 200 mm. Fitted with an internally mounted 90 l/s turbomolecular pump, backed by a 1.4 m3/h diaphragm or a 4 m3/h two stage rotary pump. . Quartz crystal monitoring system for thickness measurement in real time (1 nm precision).

Manual or automatic deposition in time and thickness. Intuitive touch screen to control the coating process and fast data entry. Records and plots coating parameters graphs. Transfers the curves and the data of the deposition process by USB port to the PC.

Automatic control of coating power independent of pressure. User-friendly software that can be updated over the network. Equipped with electronic shutter. Rotating sample holder (optional). 2-inch substrate heater, 500°C (optional).

 Dimensions: 60 × 65 × 50 cm. Weight 60 kg. (1 unit)

Vacuum pump kit

Vacuum pump kit. Includes: 1 Two-stage suction pump with a pumping capacity of 4.8 m³/h, 1 DN 16 KF metal vacuum hose 1 m long, 1 oil mist filter, 2 unions and 2 DN gaskets 16KF.

VacCoat DST1-170

VacCoat DST1-170 high vacuum metallizer. Compact system for coating a wide variety of metals such as gold (Au), platinum/palladium alloy (Pt/Pd), silver (Ag), chromium (Cr), tungsten (W), iridium (Ir), etc.

It produces uniform, high-quality films with fine grain sizes that are suitable for samples that require high-quality, high-resolution characterization, such as SEM, FE-SEM, EDS/WDS, TEM, and EBSD.

It can be used for research and different applications of micro and nanoelectronics, solar cells, coating of optical components and thin film sensors. Includes swivel sample holder with adjustable tilt and height. Sample holder with planetary rotation (optional). Intuitive touch screen to control and monitor the coating process with fast data entry capability.

Automatically controls spray power regardless of pressure. With 90 L/S (Leybold) high vacuum turbomolecular pump without oil contamination and two-stage rotary vacuum pump as backup pump. Ultimate vacuum: less than 7 x10-7 Torr.

Full range vacuum gauge (Leybold). ISO-KF 63 butterfly valve. Quartz glass thickness monitor with 1nm precision and 1 Å resolution. Electronic shutter. Argon gas electronic leakage valve.

Transfers the curves and the data of the spraying process via USB port to the PC. 80 W switching power supply.

Weight 36 kg.

VacCoat DST3

VacCoat DST3 triple target metallizer. Featuring three 2” diameter water-cooled cathodes with a common focal point making it suitable for extended deposition. You can spray from two or three (optional) targets simultaneously or independently to form alloys or multilayer deposits, respectively.

The maximum size of substrates in this model could be 3”. Suitable for spraying a single large sample with a diameter of up to 20 cm or several small samples. With RF and DC power supplies. It can spray semiconductors, dielectrics and metal targets (oxidizing and noble).

Equipped with self-adjusting match box, which minimizes the reflected power in the RF sputtering. To increase film adhesion to the substrate and improve film structures, a 300V DC bias voltage (optional) can be applied to the substrate. The cylindrical vacuum chamber is made of Pyrex with an external diameter of 300 mm and a height of 200 mm. Fitted with an internally mounted 90 l/s turbomolecular pump, backed by a 1.4 m3/h diaphragm or a 4 m3/h two stage rotary pump. Full range vacuum gauge. Selection of objectives for multilayer thin films. Co-spraying to form alloy films. Monitoring system of two quartz crystals for thickness measurement in real time (precision of 1 nm). With timed coating and manual or automatic thickness.

Independent spray rate control for each cathode to produce fine grained structures. Safe automatic control of cathode temperatures to protect the life of the magnets. Data is recorded quickly through the use of a fully automatic touch screen control. Two precision Mass Flow Meters (MFCs) for precise control of vacuum and pressure. Records and plots coating parameters Adjustable sample rotation, height and tilt.

Equipped with three manual shutters and rotating sample holder with the ability to tilt in the direction of the cathodes. Unlimited spray time without breaking the vacuum. 500 °C substrate heater (optional). 300 Vdc substrate bias voltages (optional).

Dimensions: 50 x 60 x 47 cm. Weight 120 kg.

Weight 36 kg.

VacCoat DSR1

VacCoat DSR1 metallizer. Compact system for coating noble metals such as gold (Au), palladium (Pd), platinum (Pt) and gold/palladium (Au/Pd) thin films on non-conductive or poorly conductive samples.

VacCoat DSR1 metallizer. Compact system for coating noble metals such as gold (Au), palladium (Pd), platinum (Pt) and gold/palladium (Au/Pd) thin films on non-conductive or poorly conductive samples. Uniform thin films with fine grain sizes are formed in a fast cycle time. Manual or automatic timed and thickness coating.

Pyrex cylindrical chamber 170 mm outside diameter x 140 mm. Intuitive touch screen to control and monitor the coating process with fast data entry capability. Includes swivel sample holder with adjustable tilt and height. Sample holder with planetary rotation (optional). 80 W switching power supply. With 4 m3/h two-stage direct drive rotary pump. Final vacuum: less than 40 mTorr, suitable for coating with noble metals. 2 inch magnetron cathode. Electronic shutter. Electronic leakage valve.

Transfers the curves and the data of the spraying process via USB port to the PC.

Dimensions: 45 x 50 x 37 cm. Weight 42 kg.

VacCoat DST1-300

VacCoat DST1-300 metallizer. Coating system capable of coating semiconductors, dielectrics and metals (oxidizing and non-oxidizing).

Uniform thin films with fine grain sizes are formed in a fast cycle time. Its large chamber with a 2-, 3-, or 4-inch magnetron and water-cooled cathode is ideal for coating large samples up to 15 cm in diameter, or multiple smaller samples over a similar diameter. Its unlimited spray time makes it suitable for the deposition of thick layers.

You can deposit a wide range of materials onto different surfaces for thin-film applications, such as micro- and nanoelectronics, and SEM and FE-SEM sample preparation. Controls spray rate for finer grain structure, with timed coating and manual or automatic thickness. Automatically controls spray power regardless of pressure.

Two precision Mass Flow Meters (MFCs) for precise control of vacuum pressure. With 90 L/S (Leybold) high vacuum turbomolecular pump without oil contamination and two-stage rotary vacuum pump as backup pump. Ultimate vacuum: less than 7 x10-7 Torr. Full range vacuum gauge (Leybold). Intuitive touch screen to control the coating process and fast data entry.

Easy to use software. Capable of recording and plotting coating parameters graphs. Capable of recording and plotting coating parameters graphs.

Transfer curves and data from the deposition process via USB port to the PC.

Dimensions: 58 x 50 x 63 cm. Weight 50 kg.